DESIGN BY RULE
Designing the IDT
DESIGN BY RULE
Designing the channel
The microfluidic channel uses 3 inlets, each 40 µm in diameter, feeding into a channel with mirrored outlets. The whole layout — channel and IDTs alike — is kept symmetric about a centerline.
DESIGN BY ANALYSIS
Simulate before you fabricate
Before cutting any wafers, the design is modeled in finite-element software, combining solid mechanics and electrostatics physics.
DESIGN BY ANALYSIS
Setting the boundary conditions
Solid mechanics
Fixed constraint, free surface, piezoelectric material, and a periodic boundary condition
Electrostatics
+10V drive electrode, a ground, and a zero-charge boundary elsewhere
DESIGN BY ANALYSIS
What the simulation found
A virtual probe then measures the SSAW's displacement field with the microfluidic channel positioned right at the center of the device.
UNIT 27 STUDY COMPLETE
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