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THE PHYSICS

Balancing two torques

A voltage applied to the bottom electrode pulls on the mirror support, creating an electrostatic torque. The twisting torsion beam pushes back with a mechanical restoring torque. The mirror settles wherever those two torques balance.

Telec = Tmech
A typical torsion beam material is polysilicon, with a shear modulus around 73 GPa.

PULL-IN

The moment it snaps

As voltage increases, electrostatic torque grows faster than the mechanical restoring torque can keep up with.

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Past a critical voltage, the balance fails entirely and the mirror snaps the rest of the way to its landing position. This is called pull-in, and it's exactly why a DMD mirror behaves like a clean binary switch instead of a gradual dimmer.

Pull-in isn't a design flaw to avoid here — it's the mechanism that makes a DMD pixel snap cleanly on or off.

AN ALTERNATIVE APPROACH

The Grating Light Valve

Instead of tilting a mirror, the Grating Light Valve (GLV) uses an array of electrostatically actuated diffraction-grating ribbons. Changing the spacing between ribbons changes which color of light is diffracted toward the viewer.

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GLV technology changed hands several times — from Silicon Light Machines, to Cypress Semiconductor in 2000, to Dainippon in 2008, and eventually to Sony.

MIRROR VS. GRATING

Two ways to modulate light

Reflection (Mirror)

Broadband, 1 mirror per pixel, larger millisecond-scale displacement, voltage-controlled, constant intensity.

Diffraction (GLV)

Wavelength-dependent, about 6 ribbons per pixel, tiny quarter-wavelength nanosecond-scale displacement, diffracted intensity varied by voltage.

The grating moves a thousand times less distance than the mirror — and switches a thousand times faster.

A THIRD APPROACH

Qualcomm's mirasol display

A mirasol display is, at its core, an optically resonant cavity. A self-supporting deformable reflective membrane and a thin-film stack each act as one mirror of that cavity, both sitting on a transparent substrate.

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Moving the membrane changes the cavity's gap — and therefore which wavelength of light constructively interferes and reflects back out.

UNIT 23 STUDY COMPLETE

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You've covered Tilting Mirrors & Gratings.