PART 1 • MEMS FOUNDATIONS

What are MEMS?

MEMS stands for Microelectromechanical Systems.

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MEMS combine tiny mechanical structures with electrical components to sense, move, control, or interact with the physical world.

Key idea MEMS bring mechanical and electrical behavior together at microscopic scales.

SENSING & ACTUATION

Sensors vs. Actuators

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Detects a physical quantity and converts it into a useful signal.

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Uses energy or a control signal to create physical movement or force.

A MEMS device may sense, actuate, or do both as part of a larger system.

SCALE

1 millimeter 10⁻³ m

1 micrometer 10⁻⁶ m

1 nanometer 10⁻⁹ m

Remember: 1 mm = 1,000 µm

1 µm = 1,000 nm

UNIT 1 STUDY COMPLETE

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You've covered MEMS & the Microscale.