BORROWED FROM CHIPS
Lithography makes the mould
From the chip industry
Light patterns a resist, just as in making transistors
A master
For PDMS chips, the patterned wafer is a mould, not the chip itself
Reusable
One master can mould many chips
SU-8
A thick, tough negative resist
SU-8 is an epoxy photoresist. Where UV light hits it, it cross-links and hardens (a negative resist). It can be spun from about 1 ยตm to several hundred micrometres thick with steep, straight walls.
THE MASK
Drawing with light
SPIN COATING
Spin speed sets channel height
OTHER MOULDS
Not every master needs a cleanroom
Micromilled metal
Aluminium or brass moulds, good for larger features and hot embossing
3D-printed moulds
Quick and cheap, with rougher surfaces
Dry-film resist
Laminated sheets that skip spin coating
UNIT 7 STUDY COMPLETE
Ready for the Fab Challenge?
You've followed how light, a mask and SU-8 resist make the master mould that soft lithography copies.