THE BIG SWAP
Replace the metal gate with a liquid
An ion-sensitive field-effect transistor, or ISFET, removes the metal gate. The insulator's surface is exposed to a water-based solution, and a reference electrode dipped into that solution supplies the gate voltage. Piet Bergveld introduced the idea in 1970.
ISFET CROSS-SECTION
The gate stack, rebuilt
Source, drain, and body are unchanged. Going up from the silicon, the gate stack is now an insulator, then an electrolyte, then a reference electrode. The gate voltage goes to the reference electrode, and the solution passes it down to the insulator surface.
THREE NEW PARTS
What the gate stack contains
Electrolyte
Water with dissolved ions. It conducts, so it can carry the gate voltage
Reference electrode
Holds the solution at a stable, known potential
Sensing insulator
The oxide surface that touches the liquid and reacts with it
WHAT STAYS THE SAME
The MOSFET rules still apply
THE KEY IDEA
One term depends on the solution
An ISFET's threshold has many fixed terms: the reference electrode, the silicon work function, oxide charge, and more. Only ฯโ, the potential at the insulator surface in contact with the solution, responds to the chemistry. A threshold shift is therefore a direct reading of ฯโ.
UNIT 8 STUDY COMPLETE
Ready for the Fab Challenge?
You've covered swap the metal gate for a solution and a reference electrode.