No DC gate currentThe oxide blocks charge flow, so the gate only sets a field
High input resistanceThe gate looks like a capacitor, ideal for sensing a voltage
Sensitive to chargeTrapped or nearby charge changes how the device behaves
A sensing surfaceIf the gate is exposed to a liquid, the oxide surface becomes the sensor
Keep the last one in mind: it's the bridge from transistor to biosensor.
METAL–OXIDE–SEMICONDUCTOR
The capacitor at the heart
gate | oxide | Si
Under the gate, the stack forms a capacitor: gate on top, oxide in the middle, silicon below. The oxide capacitance per area is Cox = εox / tox, with εox = 3.9 ε₀ for SiO₂. A 10 nm oxide gives about 3.45 fF per µm².
Thinner oxide means more capacitance, so the gate grips the channel harder.
THREE STATES
Accumulation, depletion, inversion
Take a p-type body. A negative gate voltage pulls holes to the surface (accumulation). A small positive voltage pushes holes away, exposing fixed negative ions (depletion). A larger voltage pulls electrons to the surface, forming an n-type layer (inversion).
Inversion is the channel: an electron layer in p-type silicon.
WALKING THE GATE VOLTAGE
What each range does
VG < 0 · accumulationHoles gather at the surface, so it looks even more p-type
VG > Vth · inversionElectrons gather at the surface and form a conducting channel
The boundaries shift slightly with the flat-band voltage, which we'll meet next.
STRONG INVERSION
How much bending is enough?
φs = 2φF
The surface is strongly inverted once the band bending φs reaches twice the Fermi potential, φF = (kT/q) ln(NA/nᵢ). For NA = 10¹⁶ cm⁻³, φF is about 0.36 V, so 2φF is about 0.71 V.
The channel's electron density at the surface matches the body's hole density.
UNIT 4 STUDY COMPLETE
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Ready for the Fab Challenge?
You've covered the gate-oxide-silicon capacitor and its three surface states.